Extraction of Bridge Fundamental Frequencies Utilizing a Smartphone MEMS Accelerometer
نویسندگان
چکیده
منابع مشابه
A Modular Mems Accelerometer Concept
Presently, main applications can be found in the automotive market segment (e.g. front and side airbag sensors, ESP respectively chassis stabilization, active suspension, roll over detection). However, low-g sensors enter also new application areas like inclinometry and vibration sensing for instance for anti-theft devices or activity monitoring for pacemaker control. Like in the microelectroni...
متن کاملA Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump
This paper presents a novel digital closed loop microelectromechanical system (MEMS) accelerometer with the architecture and experimental evaluation. The complicated timing diagram or complex power supply in published articles are circumvented by using a charge pump system of adjustable output voltage fabricated in a 2P4M 0.35 µm complementary metal-oxide semiconductor (CMOS) process, therefore...
متن کاملMEMS Accelerometer Readout
You work in a characterization laboratory af a MEMS company, and you have to design an electronic board in order to test a given capacitive accelerometer. The application of the sensor is vibration monitoring on a mechanical engine in a specific frequency range (from 40 Hz to 400 Hz). The MEMS device has a mass of 8nK g , a mechanical stiffness of 5N /m and a quality factor Q = 2. The capacitiv...
متن کاملA 1 mG lateral CMOS-MEMS accelerometer
This paper reports a lateral CMOS-MEMS accelerometer with a measured noise floor of 1mG/ and a dynamic range larger than 13G. The accelerometer is fully compatible with conventional CMOS processes enabling the integration of most of the conditioning circuits. It is fabricated in a three metal layer 0.5μm CMOS process followed by a two-step dry etch release. An improved curl matching technique i...
متن کاملDesign Optimization of MEMS Comb Accelerometer
MEMS (Microelectromechanical Systems) refers to the technology integrating electrical and mechanical components with feature size of 1~1000 microns. MEMS comb accelerometers have been successfully applied for air-bag deployment systems in automobiles. In this paper, the design optimization of a polysilicon surface-micromachined MEMS comb accelerometer is discussed. The device uses folded-beam s...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sensors
سال: 2019
ISSN: 1424-8220
DOI: 10.3390/s19143143